STM SEM CORRELATIVE STUDY OF FACETED GOLD

We have integrated an STM unit with a conventional scanning electron m icroscope in order to perform STM-SEM correlative microscopy. The meth od is applied to an electrochemically facetted gold sample, which prov ides a surface structure suitable for this study. We discuss the facto rs which are relevant in order to obtain a quantitative resolution of the topographic surface structure, by taking advantage of the performa nces of both techniques. In particular we suggest the use of the STM h eight distribution as the best parameter for STM/SEM correlation. Fina lly, from the STM data we deduce that the main process during electroc hemical etching is the formation of (111) faces.