Epitaxial YBCO superconducting thin films have been grown in-situ by X
eCl excimer laser ablation using an off-axis deposition geometry. This
PLD geometry allows to obtain films with an excellent surface morphol
ogy without droplets or other particulates. The as-obtained YBCO films
exhibit good structural and superconducting properties with T-c(R=0)
= 89.5 K, R-(300)/R-(100) = 2.8, Delta T = 1.3 K, J(c) = 2 x 10(6) A/c
m(2) (at 77 K and zero magnetic field) and full width half maximum of
the rocking curve of the (005) YBCO peak of about 0.16 degrees. These
structural and electrical properties are very close to those of the YB
CO films deposited by the conventional PLD on-axis geometry.