T. Hashimoto et al., NANOPROCESSING BASED ON BICONTINUOUS MICRODOMAINS OF BLOCK-COPOLYMERS- NANOCHANNELS COATED WITH METALS, Langmuir, 13(26), 1997, pp. 6869-6872
A novel process to produce a nanochannel comprised of a void in a poly
mer matrix is reported. The processing involves a selective degradatio
n of one of the bicontinuous microdomain phases of microphase-separate
d block copolymers to create a continuous, tortuous hole having a diam
eter of nanometer scale (nanochannel) and plating of the surfaces with
nickel metal. The nanochannel and the metal plating were confirmed by
the transmission and scanning electron microscopies.