THE FORMATION OF NANO-DOT AND NANO-RING STRUCTURES IN COLLOIDAL MONOLAYER LITHOGRAPHY

Monolayers of colloidal particles formed in a self-organizing process upon drying of a colloidal suspension are used as lithographic masks. After deposition of a thin metal layer, the mask is detached from the surface. The resulting surface is examined with optical, scanning elec tron, and atomic force microscopes. In addition to the well-known tria ngular structures, which reflect the gaps in the hexagonal arrangement of the particles, we observed the following additional features: hill ocks (nano-dots) found just below and nano-rings found around the orig inal location of the particles. These features may develop during deta chment (hillocks) and formation (rings) of the mask, respectively. Hil locks develop as a consequence of the adhesion of the particles on the surface, whereas rings are formed from organic residuals in the suspe nsion. We show that these features can be used to fabricate fluorescen t dye rings of submicron size.