Pyrolysis of trichlorosilane (TCS) and copyrolysis of TCS with 1,3-but
adiene were studied. The enthalpies and activation energies for the re
actions of the products of TCS pyrolysis were found by quantum-chemica
l calculations. A direct study of the pyrolysis of TCS by mass spectro
metry was carried out. Based on the thermochemical parameters found by
quantum-chemical calculations and on the results of GLC and mass spec
trometry concerning the composition of the pyrolysis products, it was
concluded that the pyrolysis of TCS follows a scheme that includes for
mation of radicals and silylenes.