We investigated the influence of carbon addition on oxygen solubilitie
s in silicon melts. Oxygen concentration increases with increasing car
bon concentration in silicon melts when melt temperatures are above 14
70 degrees C. The temperature dependence of oxygen concentration in ca
rbon-doped silicon melts is strong when carbon concentration is above
5.0 x 10(17) atoms/cm(3). It is found that 87% of the oxygen atoms are
related to carbon in carbon-doped silicon melts when carbon concentra
tion is 3.0 x 10(18) atoms/cm(3) and silicon melt temperature is 1500
degrees C.