HIGH-FREQUENCY PROPERTIES OF SRTIO3 THIN-FILM CAPACITORS FABRICATED ON POLYMER-COATED ALLOY SUBSTRATES

Authors
SUGII N YAMADA H KAGAYA O YAMASAKI M SEKINE K YAMASHITA K WATANABE M MURAKAMI S
Citation
N. Sugii et al., HIGH-FREQUENCY PROPERTIES OF SRTIO3 THIN-FILM CAPACITORS FABRICATED ON POLYMER-COATED ALLOY SUBSTRATES, Applied physics letters, 72(2), 1998, pp. 261-263
Citations number
4
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
72
Issue
2
Year of publication
1998
Pages
261 - 263
Database
ISI
SICI code
0003-6951(1998)72:2<261:HPOSTC>2.0.ZU;2-B
Abstract
Low-temperature (200 degrees C) sputter deposition of SrTiO3 (STO) thi n films by using ultrahigh-density ceramic target enabled us to fabric ate capacitors on polyimide-isoindroquinazoline dione (PIQ)- or benzoc yclobutene (BCB)-coated alloy substrates. Complex impedances of the ca pacitors were analyzed. Capacitances of the 0.01 mm(2) area capacitors with 200-nm-thick STO films were around 22 pF and were not dependent on frequency up to 8 GHz. Leakage-current densities of the films were lower than 10(-6) A/cm(2) at an applied voltage of 10 V and dielectric loss tangents were lower than 10(-6). (C) 1998 American Institute of Physics.