NONKINETIC DAMAGE ON INSULATING MATERIALS BY HIGHLY-CHARGED ION-BOMBARDMENT

Authors
PARKS DC STOCKLI MP BELL EW RATLIFF LP SCHMIEDER RW SERPA FG GILLASPY JD
Citation
Dc. Parks et al., NONKINETIC DAMAGE ON INSULATING MATERIALS BY HIGHLY-CHARGED ION-BOMBARDMENT, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 134(1), 1998, pp. 46-52
Citations number
24
Categorie Soggetti
Instument & Instrumentation","Nuclear Sciences & Tecnology","Physics, Atomic, Molecular & Chemical
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
134
Issue
1
Year of publication
1998
Pages
46 - 52
Database
ISI
SICI code
0168-583X(1998)134:1<46:NDOIMB>2.0.ZU;2-1
Abstract
We have measured the damage caused by the impact of low velocity, high ly charged ions on insulating surfaces. Atomic force microscopy allows us to observe directly the surface topography with nanometer resoluti on. Using constant velocity (100 keV) Xe7+ ions (25 less than or equal to less than or equal to 50) impinging on mica, we observe damage cau sed by single ion impacts. Impact sites typically are circular hillock s. Within the range and accuracy of the data, the height and volume of the damaged regions are well approximated by a linear function of ion potential energy. (C) 1998 Elsevier Science B.V.