AN IMPROVED METHOD FOR THE STUDY OF NEUTRAL SPECIES PRODUCED IN PROCESSING PLASMAS

Authors
REES JA SEYMOUR DL GREENWOOD CL SCOTT A
Citation
Ja. Rees et al., AN IMPROVED METHOD FOR THE STUDY OF NEUTRAL SPECIES PRODUCED IN PROCESSING PLASMAS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 134(1), 1998, pp. 73-76
Citations number
6
Categorie Soggetti
Instument & Instrumentation","Nuclear Sciences & Tecnology","Physics, Atomic, Molecular & Chemical
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
134
Issue
1
Year of publication
1998
Pages
73 - 76
Database
ISI
SICI code
0168-583X(1998)134:1<73:AIMFTS>2.0.ZU;2-K
Abstract
Neutral, electronegative particles, including radicals, produced in a processing plasma may be studied by using a mass spectrometer to exami ne the negative ions formed from them in the source of the mass spectr ometer. The technique has advantages over the more usual technique of examining positive ion formation from sampled neutral species. Experim ental data for a carbon dioxide plasma are shown to illustrate the met hod. (C) 1998 Elsevier Science B.V.