CPW LOW-PASS FILTERS ON SILICON SUBSTRATE FOR MULTILAYER MMICS

A multilayer coplanar waveguide low-pass filter on an Si substrate fab ricated by using MMIC technology is presented, and the performance is investigated experimentally and with electromagnetic simulations. The filter is a Chebyshev type consisting of three low-impedance sections and two high-impedance sections. The low-impedance sections have a cha racteristic impedance of 3 Ohm. The high-impedance lines use a narrow center conductor mounted on top of the polyimide layers in order to ac hieve as high an impedance as possible (100 Ohm). (C) 1998 John Wiley & Sons, Inc.