A multilayer coplanar waveguide low-pass filter on an Si substrate fab
ricated by using MMIC technology is presented, and the performance is
investigated experimentally and with electromagnetic simulations. The
filter is a Chebyshev type consisting of three low-impedance sections
and two high-impedance sections. The low-impedance sections have a cha
racteristic impedance of 3 Ohm. The high-impedance lines use a narrow
center conductor mounted on top of the polyimide layers in order to ac
hieve as high an impedance as possible (100 Ohm). (C) 1998 John Wiley
& Sons, Inc.