ULTRATHIN LAYERS OF RARE-EARTH-OXIDES FROM LANGMUIR-BLODGETT-FILMS

Ultrathin rare earth oxide films have been fabricated using Langmuir-B lodgett films of rare earth arachidates as precursors. Irradiation of these films with UV light and subsequent heating of the films (350 deg rees C) result in oxide films exhibiting a smoothness comparable to th at of the Si-wafers used as substrates (roughness R approximate to 0.3 MI). The film thickness can easily be adjusted via the number of Lang muir-Blodgett monolayers deposited onto the substrate. (C) 1997 Publis hed by Elsevier Science S.A.