CALIBRATING THE DIALS OF THE AZIMUTHAL SCALES OF ELLIPSOMETERS

This paper proposes a method of calibrating the dials of the azimuthal scales of an ellipsometer by scanning the positions of an analyzer cl ose to the plane of incidence and perpendicular to it. In this case, t he dependences of the positions of the polarizer and compensator for t he minimum reflected light are straight lines for any angles of incide nce of light on the sample. These lines intersect close to the desired values. (C) 1997 The Optical Society of America. [S1070-9762(97)01812 -5].