PVD PROCESSES - RF AND MICROWAVE PLASMA SOURCES

Authors
MATTOX DM
Citation
Dm. Mattox, PVD PROCESSES - RF AND MICROWAVE PLASMA SOURCES, Plating and surface finishing, 85(1), 1998, pp. 84-85
Citations number
1
Categorie Soggetti
Metallurgy & Metallurigical Engineering","Materials Science, Coatings & Films
Journal title
Plating and surface finishing → ACNP
ISSN journal
03603164
Volume
85
Issue
1
Year of publication
1998
Pages
84 - 85
Database
ISI
SICI code
0360-3164(1998)85:1<84:PP-RAM>2.0.ZU;2-V