T. Kamikubo et al., PROXIMITY EFFECT CORRECTION FOR ELECTRON-BEAM LITHOGRAPHY - HIGHLY ACCURATE CORRECTION METHOD, JPN J A P 1, 36(12B), 1997, pp. 7546-7551
A new formula for proximity effect correction is discussed. The formul
a is represented by a series expansion. When infinite terms are used;
the formula gives accurate optimum correction doses. The correction ac
curacy of the new formula is evaluated for the worst case scenario and
compared with the conventional formula. It is shown that (1);the new
formula suppresses correction errors to less than 0.5% for the deposit
ed energy and (2) dimensional errors are less than 4 nm, even if only
the first 3 terms are calculated for critical patterns. By using the n
ew formula, the proximity effect correction can be carried out with su
fficient accuracy, even for making reticles of 1 Gbit or higher-capaci
ty DRAMs.