FABRICATION OF A 3-DIMENSIONAL VACUUM MAGNETIC SENSOR WITH A SI TIP

A new vacuum magnetic sensor (VMS) device suitable for three-dimension al detection of magnetic Bur was fabricated. This device consists of a Si field emitter tip that generates a cross-shaped electron beam and an anode that is divided into eight symmetrically arranged sectors. Th e cross-shaped electron beam is rotated and displaced from an initial position by the magnetic flux in accordance with the Lorentz force int eraction. The rotation angle and the translational displacement were m easured from the beam current imbalance between two neighboring anode sectors. Detection sensitivities of 10(4)%/T and 10(3)%/T were obtaine d for magnetic flux applied parallel and perpendicular to the VMS devi ce, respectively.