FORMATION OF A NEW PHASE IN RU FILMS BY SPUTTERING BASED ON BAND CALCULATION PREDICTION

The formation of tl le metastable Ru films sputtered onto a glass subs trate and single crystals with different lattice constants was studied . X-ray diffraction(XRD) and electron beam diffraction(EBD) analyses r evealed a new phase that grew on Mo single crystal, which appears to b e a single-crystal-like body centered tetragonal structure, although t he equilibrium phase is hexagonal close-packed structure. Such phase f ormation is reasonable considering the total energy-calculated by band calculation.