BASIC STUDY OF QUANTITATIVE ION-SCATTERING SPECTROSCOPY-I CORRECTION FACTORS FOR QUANTIFICATION

Basic problems in quantification by ion scattering spectroscopy (ISS), i.e., energy dependence of the detection efficiency of a micro channe l plate (MCP) and neutralization probabilities, have been studied usin g a newly constructed time of flight (TOF)-ISS apparatus. For primary ion energy below keV (1) marked dependence of the detection efficiency of MCP on the signal energy, and (2) strong contribution, to the ISS spectrum, of those neutral signals that are backscattered through the collision with the second or subsequent atomic layer atoms have been c learly revealed. It has also been pointed out that the energy dependen ce of the detection efficiency is described very well by a simple stat istical treatment of secondary electron generation in the detector.