EFFECT OF LOCALIZED VIBRATIONS ON THE SI SURFACE CONCENTRATIONS OF H AND D

Citation
Ip. Ipatova et al., EFFECT OF LOCALIZED VIBRATIONS ON THE SI SURFACE CONCENTRATIONS OF H AND D, Journal of applied physics, 83(2), 1998, pp. 814-819
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00218979
Volume
83
Issue
2
Year of publication
1998
Pages
814 - 819
Database
ISI
SICI code
0021-8979(1998)83:2<814:EOLVOT>2.0.ZU;2-P
Abstract
The equilibrium concentration of passivating adatoms in the system of Si crystal plus the gas of H-2 (or D-2) molecules is calculated The ef fect of adatom localized vibrations on the equilibrium concentration i s taken into account. It is shown that the substitution of D for H loa ds to an increase of the adatom concentration by 1-1.5 orders of magni tude. (C) 1998 American Institute of Physics. [S0021-8979(98)00402-2].