We present the nano-hardness tester (NHT), a new depth-sensing instrum
ent with a differential capacitive sensor providing nanometer depth re
solution and allowing partial elimination of the frame compliance. Wit
h micron lateral positioning of the sample and topographical measureme
nt of the residual indent, using scanning force microscopy, it is poss
ible to gain a better understanding of the indentation method and its
effects on the material being tested. Furthermore, parallel imaging al
lows the material response to be directly investigated. Experimental r
esults are presented for a selection of aged austeno-ferritic stainles
s steels; these confirm the ability of the NHT to become a common test
instrument in quality assurance and process development of multiphase
materials. (C) 1997 Elsevier Science S.A.