GLOW-DISCHARGE OPTICAL SPECTROSCOPY DEPTH PROFILES OF ION-IMPLANTED STEEL, TITANIUM AND TITANIUM NITRIDE COATINGS

The resistance of ion implanted surfaces against wear and corrosion is influenced by the chemical composition of the modified zone. It is sh own that glow discharge optical spectroscopy (GDOS) is a sensitive and easily applicable technique to investigate composition depth profiles of implanted layers. Despite the layer thickness of less than 1 mu m a good resolution can be realized by using polished sample surfaces an d suitable analyzing parameters. Results of carbon and nitrogen implan tations in various doses into high speed steel, pure titanium, Ti-6Al- 4V and physical vapor deposited (PVD) titanium nitride coatings are pr esented. Substantial differences in the depth profiles were found for carbon and nitro en implantations into M2 steel and into TiN coatings. Carbon implantations show almost Gaussian-like carbon depth distribut ions with increasing maximum concentration corresponding to higher imp lantation doses. However, the amount of nitrogen which can be incorpor ated by ion implantation into TiN coatings was found to be limited and an almost uniform saturation concentration within the implanted zone was detected. (C) 1997 Elsevier Science S.A.