FUNDAMENTAL INSIGHT ON DEVELOPING LOW DIELECTRIC-CONSTANT POLYIMIDES

Thermally stable, durable, insulative polyimides are in great demand f or the fabrication of microelectronic devices. In this investigation d ielectric and optical properties have been studied for several series of aromatic polyimides. The effect of polarizability, fluorine content , and free volume on dielectric constant was examined. In general, min imizing polarizability, maximizing free volume and fluorination all lo wered dielectric constants in the polyimides studied. Published by Els evier Science S.A.