FACTORS GOVERNING THE DISCHARGE OF ELECTROSTATIC MIRROR FORMATIONS INTHE SCANNING ELECTRON-MICROSCOPE

Two primary parameters for an automated electrostatic mirror discharge technique are studied, namely the discharge voltage and the discharge current. It was found that using discharge voltages corresponding to the sigma > 1 region and near the first crossover point of a sample's total yield curve gave the optimum discharge rate for the technique. A lso, using discharge currents larger than the scanning current was sho wn to improve the rate of discharge. These optimizations ensure the fe asibility of this technique as a discharge tool where repeated high an d low beam voltage switching in the scanning electron microscope is ne eded. (C) 1998 American Institute of Physics.