STUDYING OF SILANE THERMAL-DECOMPOSITION MECHANISM

The mechanism of silane thermal decomposition is investigated in a flo w reactor. The time dependencies of silane consumption and disilane fo rmation were compared with those parameters of solid product (aerosol particles) such as concentration, total hydrogen content in solid prod uct, and fraction of hydrogen contained in solid product as polyhydrid e groups (SIH2)(n). Silane loss and gaseous product formation were ana lyzed using a mass spectrometer. The hydrogen content in solid product was analyzed by the methods of IR-spectroscopy and hydrogen evolution . Based on a simple kinetic scheme we qualitatively explained the expe rimental dependencies of silane conversion and disilane formation, the effective activation energy of the decomposition process, and the amo unt of polyhydride groups in the solid product on reaction time and in itial silane concentration. (C) 1998 John Wiley & Sons, Inc.