15-TERM SELF-CALIBRATION METHODS FOR THE ERROR-CORRECTION OF ON-WAFERMEASUREMENTS

An improved method of network analyzer calibration is described using the 15-term full model which includes all leakage errors between on-wa fer probe tips. This model is well suited to eliminate measurement err ors of network analyzer measurements on the wafer, All procedures pres ented are so-called self-calibration methods, allowing for standards t hat are not completely known, This allows to create calibration standa rds in an easy way and to monitor the calibration process, Simple and robust closed-form equations are presented for all procedures, All pro cedures can be derived from the general method MURN (match, unknown, r eflect, network), The MORN (match, open, reflect, network) is presente d, which is particular interesting for on-wafer-measurements. Furtherm ore, the TMRN (through, match, reflect, network) procedure presented i s especially designed for coaxial measurement problems, Experimental r esults of the TMRN method attest to the very good accuracy and viabili ty of the 15-term self-calibration procedures and can be compared with other 15-term procedures.