HELICONS - THE PAST DECADE

Citation
Ff. Chen et Rw. Boswell, HELICONS - THE PAST DECADE, IEEE transactions on plasma science, 25(6), 1997, pp. 1245-1257
Citations number
180
Categorie Soggetti
Phsycs, Fluid & Plasmas
ISSN journal
00933813
Volume
25
Issue
6
Year of publication
1997
Pages
1245 - 1257
Database
ISI
SICI code
0093-3813(1997)25:6<1245:>2.0.ZU;2-4
Abstract
First observed in gaseous plasmas in the early 1960's, helicon dischar ges lay like a sleeping giant until they emerged in the 1980's, when t heir usefulness as efficient plasma sources for processing microelectr onic circuits for the burgeoning semiconductor industry became recogni zed, Research on helicons spread to many countries; new, challenging, unexpected problems arose, and these have spawned solutions and novel insights into the physical mechanisms in magnetized radio-frequency di scharges, Among the most baffling puzzles were the reason for the high ionization efficiency of helicon discharges and the dominance of the right-hand polarized mode over the left-hand one, The most recent resu lts indicate that a nonobvious resolution of these problems is at hand .