The dielectric relaxation of Ba0.7Sr0.3TiO3 thin films was investigate
d up to K band (20 GHz) using time domain and frequency domain measure
ments. Our results show that from 1 mHz to 20 GHz, the dielectric rela
xation of the complex capacitance of Ba0.7Sr0.3TiO3 thin films can be
understood in terms of a power law dependence known as the Curie-von S
chweidler law. The small dispersion (less than 7% decrease in capacita
nce from 1 mHz to 20 GHz) and low loss (loss angle less than 0.006 at
20 GHz) measured in Ba0.7Sr0.3TiO3 thin films indicate that these film
s are applicable to device application up to at least K band. (C) 1998
American Institute of Physics.