X-RAY CONTACT MICROSCOPIC IMAGING IN KEV SPECTRAL REGION USING LASER-PRODUCED PLASMAS

We report here contact microscopic imaging in keV spectral region usin g pulsed X-ray emission from laser-produced plasmas, The X-ray source was produced by focusing single laser pulses of second harmonic of Nd: glass laser with a peak power of 3 GW in 3 nS (FWHM) on planar targets of copper. Single shot X-ray images of 1:1 magnification and an estim ated spatial resolution similar to 120 nm were obtained on a ERP-40 ph otoresist-coated silicon wafer. These images were subsequently viewed under scanning electron microscope and atomic force microscope for hig h magnification, and with a differential interference contrast optical microscope for colour contrast, Details of the imaging technique are presented, and images recorded for yeast cells are given as an example .