PAPERS FROM THE TOPICAL CONFERENCE ON MANUFACTURING SCIENCE AND TECHNOLOGY - 24-27 OCTOBER 1994, COLORADO CONVENTION CENTER, DENVER, COLORADO - PREFACE

Authors
RUBLOFF GW LIEHR M
Citation
Gw. Rubloff et M. Liehr, PAPERS FROM THE TOPICAL CONFERENCE ON MANUFACTURING SCIENCE AND TECHNOLOGY - 24-27 OCTOBER 1994, COLORADO CONVENTION CENTER, DENVER, COLORADO - PREFACE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(4), 1995, pp. 1861-1861
Citations number
NO
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
4
Year of publication
1995
Pages
1861 - 1861
Database
ISI
SICI code
1071-1023(1995)13:4<1861:PFTTCO>2.0.ZU;2-U