DEVELOPMENT AND CALIBRATION OF A SUBMILLIMETER 3-COMPONENT FORCE SENSOR

A sub-millimeter three-component force sensor has been developed using silicon microfabrication technology. A polysilicon cross-beam, 300 mu m X 300 mu m, with 12 piezoresistive strain gauges integrated on it, is the elastic element of the sensor. The strains detected by the stra in gauges are measures of the three orthogonal components of the force applied at the center of the cross-beam. Calibration of the sensor is achieved by generating electromagnetic forces on an aluminum cross-be am that is suspended over the sensor structure. (C) 1998 Elsevier Scie nce S.A.