METHOD OF FABRICATION OF ISFET-BASED BIOSENSORS ON AN SI-SIO2-SI STRUCTURE

Authors
POGHOSSIAN AS
Citation
As. Poghossian, METHOD OF FABRICATION OF ISFET-BASED BIOSENSORS ON AN SI-SIO2-SI STRUCTURE, Sensors and actuators. B, Chemical, 44(1-3), 1997, pp. 361-364
Citations number
8
Journal title
Sensors and actuators. B, Chemical → ACNP
ISSN journal
09254005
Volume
44
Issue
1-3
Year of publication
1997
Pages
361 - 364
Database
ISI
SICI code
0925-4005(1997)44:1-3<361:MOFOIB>2.0.ZU;2-8
Abstract
A new ISFET-based biosensors fabrication method, based on an Si-SiO2-S i structure is presented. The method was demonstrated by constructing glucose sensor and its performance was evaluated experimentally. The p reliminary results of investigation of the behaviour of developed gluc ose sensor-in human urine are presented. The proposed fabrication meth od can be applied to various BioFETs. (C) 1997 Elsevier Science S.A.