A microsensor array to measure chemical properties of biological liqui
ds is presented. A hybrid integration technique is used to mount four
sensor chips on a micro flow channel: a pressure, temperature, pH, com
bined pO(2) and pCO(2) sensor chip. This results in a microsensor arra
y which is developed to meet the technical requirements for space appl
ications, The integration method allows to integrate other types of se
nsor chips, This multi-purpose and multi-user approach makes the micro
sensor array suitable for various biochemical applications. (C) 1997 P
ublished by Elsevier Science S.A.