The charge release speed and backward phase switching time of lanthanu
m-doped lead zirconate titanate stannate antiferroelectric thin films
were investigated by directly measuring the switching current upon rem
oval of the applied electric field. The backward switching time is abo
ut 6 ns. The maximum switching current density can reach 9400 A/cm(2),
and more than half of the stored charge can be released in 10 ns. The
se results show that the obtained antiferroelectric thin films are ver
y promising for decoupling capacitor applications in high speed multic
hip modules. (C) 1998 American Institute of Physics.