TEXTURE DEVELOPMENT, MICROSTRUCTURE EVOLUTION, AND CRYSTALLIZATION OFCHEMICALLY DERIVED PZT THIN-FILMS

Two solution-based methods, metallo-organic decomposition and sol-gel processes, were used to study the effects of precursor solution type o n the microstructure evolution and texture development of oriented PZT films. Microstructure development and perovskite content are strongly dependent on the heating rate. Fast heating rate forms a dense fine-g rained microstructure with (111) orientation. Intermediate-temperature pyrolysis followed by a fast heating rate forms clustered or island s tructures of submicrometer grains with (100) orientation. Intermediate -temperature pyrolysis followed by a very slow heating rate forms larg er spherical rosettes with random orientations. Pt5-7Pb is a (111) tex tured transient intermetallic phase that nucleates PZT(111) texture. P bO is a (001) textured layer compound that nucleates PZT(100) texture. The texture selection of PZT films is independent of precursor system s but sensitive to the film thickness especially when sol-gel precurso rs and oxidizing atmosphere are used. Correlation and comparison of or iented sol-gel and MOD PZT films with electrical properties are also m ade.