Temperature dependent mobility, resistivity, and carrier concentration
measurements were made on epitaxial single crystal thin films of grou
p III-rich CuIn1-xGaxSe2 (CIGS). The films were produced using a hybri
d sputtering and evaporation process on GaAs substrates. Samples with
average Ga/(In+Ga) values between 0.03 and 1.0 and Cu/(In+Ga) between
0.73 and 1.00 were measured. All films were p type with room-temperatu
re carrier concentrations between 4x10(16) and 2x10(19) cm(-3). Fits t
o electrical measurements were consistent with the presence of two acc
eptor levels, with activation energies of 167+/-20 and 42+/-8 meV at l
ow Ga contents, and compensating donors in all samples. Increasing Ga
content was found to increase acceptor density and decrease acceptor l
evel depth. Hole mobilities near room temperature were found to be bet
ween 167 and 311 cm(2)/V s and peak mobilities were between 439 and 17
60 cm(2)/V s. Mobility behavior did not change significantly as a func
tion of composition or the presence of a Ga gradient. (C) 1998 America
n Institute of Physics. [S0021-8979(98)00403-4].