HIGH-FREQUENCY PERMEABILITY OF SOFT-MAGNETIC FE-HF-O FILMS WITH HIGH-RESISTIVITY

A series of Fe-Hf-O films has been prepared by means of rf sputter dep osition. The composition for optimal permeability was found to be Fe55 Hf17O28. These films exhibit a combination of soft-magnetic properties (mu>10(3), H-c<50 A/m, mu(0)M(s) greater than or equal to 1.0 T) and a high resistivity (rho>1 m Ohm cm) after rapid thermal annealing in f lowing argon at 400 degrees C in a dc magnetic field. The structure of the films consists of alpha-Fe nanocrystallites, randomly dispersed i n an amorphous matrix. The amorphous phase is essential in achieving t he advantageous combination of properties. In contrast to conventional soft-magnetic films, the properties of the Fe55Hf17O28 films do not s how a strong thickness dependence for thicknesses up to 10 mu m. There fore, the roll-off frequency of the initial relative permeability for 10 mu m thick films is high, but not as high as expected from only the resistivity. It is shown that, besides electromagnetic induction, fer romagnetic resonance is also essential in explaining the observed freq uency dependence of the permeability. (C) 1998 American Institute of P hysics. [S0021-8979(98)00703-8].