ELECTRON-CYCLOTRON-RESONANCE ASSISTED CHEMICAL-VAPOR-DEPOSITION OF CARBON NITRIDE FILMS ON DIAMOND

Carbon nitride films were prepared using an electron cyclotron resonan ce enhanced chemical vapor deposition apparatus. A two-step mode was a dopted in which a diamond layer was first deposited onto the substrate (Si or Mo), and then the carbon nitride films were grown. Detailed x- ray photoelectron analyses show that the carbon and nitrogen atoms hav e formed a nonpolar covalent bond. The nitrogen concentrations in the films remain unchanged when the substrate temperatures vary from 100 t o 700 degrees C, which suggests that a stable phase has formed. (C) 19 98 American Institute of Physics. [S0021-8979(98)04003-1].