A THERMODYNAMICAL GROWTH-MODEL OF THE SNO2 FE2O3 MULTILAYER FILMS/

The microstructural investigation of SnO2/Fe2O3 multilayer films, prep ared by PECVD, was studied by SEM. It is found that the SnO2 films gro w up from the pits of Fe2O3 columnar structure. From experimental phen omenon, a thermodynamical growth model of multilayer films has been su ggested. The calculation shows that SnO2 grow up very fast from the Fe 2O3 pits at the beginning of deposition. After that, the growth rate d ecreases gradually, and then, the rate becomes stable, the columnar st ructure forms at a stable growth rate. The contact area of SnO2 with F e2O3 film is increased in this case, which makes these films have a st rong adhesion. (C) 1997 Elsevier Science S.A.