ALTERNATIVE APPROACH TO ELECTROLESS CU METALLIZATION OF ALN BY A NONAQUEOUS POLYOL PROCESS

Citation
Gm. Chow et al., ALTERNATIVE APPROACH TO ELECTROLESS CU METALLIZATION OF ALN BY A NONAQUEOUS POLYOL PROCESS, Applied physics letters, 70(17), 1997, pp. 2315-2317
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00036951
Volume
70
Issue
17
Year of publication
1997
Pages
2315 - 2317
Database
ISI
SICI code
0003-6951(1997)70:17<2315:AATECM>2.0.ZU;2-0
Abstract
Cu metallization of AIN substrates was performed using a nonaqueous, e lectroless; alcohol based approach known as the polyol method. The con centration of Cu2O in the film depended on the orientation of the subs trates during deposition. This approach is very attractive for metalli zing electronic substrates which are susceptible to hydrolytic degrada tion. (C) 1997 American Institute of Physics.