INTRIX - A NUMERICAL-MODEL FOR ELECTRON-PROBE ANALYSIS AT HIGH DEPTH RESOLUTION PART-I - THEORETICAL DESCRIPTION

The theoretical description of a quantitative electron probe model, In triX, is presented. It consists of a numerical reconstruction of the i n-depth ionization distribution Phi(rho z) through the use of basic ph ysical macroscopic parameters describing the electron beam-matter inte raction, With the aim of characterizing nanometer features in samples, specific attention is paid to the treatment of analysis performed on in-depth non-homogeneous samples (films on substrates) and also at low beam energies E-0 (E-0 < 5 keV) and near the ionization threshold E-c (E-0/E-c < 2). (C) 1998 John Wiley & Sons, Ltd.