Imaging of random surfaces can be modelled by integration over angular
spectra of scattered plane waves. This approach suggests the represen
tation of surface scattering in the Kirchhoff approximation using the
concept of three-dimensional spatial frequencies. Optical methods of s
urface profiling can thus be modelled, leading to an insight into reco
nstruction of surface profiles from scattering data. The methods can a
lso be extended to cover thin-film multilayer structures.