Nonstochiometric mixed oxides are often of interest for their novel ca
talytic or material properties yet are often difficult to synthesize i
n easily characterizable forms. We report on the use of low-temperatur
e epitaxy of Ca and Mg under oxidizing conditions to yield mixed thin
film oxides. Low-energy electron diffraction showed that the mixed oxi
des grew as single crystals over a wide range of compositions. We comp
are the water adsorption characteristics of the mixed oxide to that of
CaO and MgO and find that the mixed oxide behavior is not a linear co
mbination of the two pure oxide systems. The thermal stability of the
mixed oxide film was checked by Anger electron ratios for an oxide-oxi
de ''sandwich'' after various ''flash'' anneals. This and water adsorp
tion results suggest intimate atomic-scale mixing exists until flashed
above 1100 K.