PROJECTED RANGE AND RANGE STRAGGLING OF ION-IMPLANTED LEAD IN POLYSTYRENE MATERIALS

Polystyrene targets were implanted with 5x10(14) lead ions/cm(2) at en ergies from 40 to 360 keV at room temperature. Projected ranges and ra nge stragglings were measured using SIMS. Experimental results are com pared with calculated values obtained using the modified Biersack theo ry and TRIM-95 Monte-Carlo calculations. The comparison shows that lar ge discrepancies between TRIM-95 calculations and measured values are significantly reduced by applying the modified Biersack theory along w ith taking the first four moments of nuclear and electronic energy los ses into consideration. The differences between calculated values obta ined using the modified Biersack theory and measured values are, on av erage, 9% and 20% projected ranges and range stragglings, respectively .