DETERMINATION OF THIN-FILM OPTICAL-PROPERTIES BY THE PHOTOACOUSTIC OPC TECHNIQUE

Citation
C. Garciasegundo et al., DETERMINATION OF THIN-FILM OPTICAL-PROPERTIES BY THE PHOTOACOUSTIC OPC TECHNIQUE, Journal of physics. D, Applied physics, 31(2), 1998, pp. 165-171
Citations number
25
Categorie Soggetti
Physics, Applied
ISSN journal
00223727
Volume
31
Issue
2
Year of publication
1998
Pages
165 - 171
Database
ISI
SICI code
0022-3727(1998)31:2<165:DOTOBT>2.0.ZU;2-H
Abstract
Through the use of maxima and minima of interference fringes in transm ittance spectra registered by the open photoacoustic cell (OPC) detect ion technique, we have determined the refraction index n and thickness d of aluminium nitride thin films which had previously been deposited on opaque and transparent substrate. The results for the transparent substrate are in agreement with those obtained from the transmission s pectra. To determine n as a function of lambda we developed a novel pr ocedure for the analysis of the OPC spectra. The n values so obtained were introduced in an appropriate Airy transmittance function, and the ir numerical evaluation permits the reproduction of the experimental t ransmittance OPC data and optical curves. This scheme was used to esta blish the uniqueness of the calculated data.