MECHANICAL-PROPERTIES OF TIN-TIC MIXED-CRYSTAL FILMS

Deposited films of TiN-TiC systems with solid solutions were prepared over the range 0.2-0.8 in x defined by TiCxN1-x, using a RF magnetron sputtering method. Tribological properties of the samples were examine d as a function of x. Microhardness increased with x, and reached maxi mum at around 0.7. Adhesive force between the deposited film and the s ubstrate (high-speed steel) were measured by a scratch test. It was ob tained that the adhesive force increased with x and reached maximum at about 0.5. The friction coefficient decreased monotonously with x, bu t showed a tendency to become minimum at 0.4-0.5. The wear rate showed a complex phenomena with the x-value, indicating two maximums at abou t 0.2 and 0.8. X-ray diffraction analyses were conducted with the film samples. The change in microhardness with x was clearly associated wi th the physical breadth. It was found that the major part of physical breadth was due to lattice distortion in all samples. The decrease in I(111)/I(200) also related to the increase in the microhardness. Stack ing faults were found to form in the film during the sputtering deposi tion, suggesting that vacancy platelets were generated in the sample d epending on the value of the stacking probability.