The number of DRAMs that have adopted hierarchical word-line architect
ure has increased as developed DRAM memory capacity has increased to m
ore than 64 Mb. Use of the architecture enhances many kinds of DRAM pe
rformances, such as access time and fabrication process margin. Howeve
r, the architecture does cause some problems. This paper describes som
e kinds of hierarchical word-line circuitries that have been proposed.
It also describes a partial subarray activation scheme that is combin
ed with hierarchical word-line and data-line architectures and discuss
es their potential and required specifications for future multi-giga b
it DRAMs.