MICROLENSES AND MICROLENS ARRAYS FORMED ON A GLASS PLATE BY USE OF A CO2-LASER

Microlenses and microlens arrays were formed directly on a surface of a glass plate by use of a CO2 laser. When the surface of a glass plate is heated locally to a working point of the glass material by use of a focused CO2 laser beam, it tends to become a hyperboloid owing to su rface tension, which results in a microlens. A profile of the microlen s was measured with an ultrahigh accurate three-dimensional profilomet er (Model UA3P, Matsusita Electric Industrial Company Ltd.) that utili zes a specially designed atomic force microscope. An intensity profile and a spot diameter at the focus of the microlens were measured with a microscope and a CCD system utilizing a He-Ne laser as a Light sourc e. The focused spot FWHM diameter of 1.35 mu m was obtained, and the m odulation transfer function was derived from the spot profile. Microle ns arrays were also fabricated and characterized. (C) 1998 Optical Soc iety of America.