GENERATION AND DEPOSITION OF FULLERENE-RICH AND NANOTUBE-RICH CARBON THIN-FILMS

We report the generation of fullerenes and nanotubes using an arc disc harge on graphite in a high-pressure nozzle. The vapour from the arc i s quenched via collisions with helium gas, forming carbon clusters wit hin a localized high-pressure region. The carbon molecules are entrain ed in the gas jet as it expands into the vacuum and deposited onto a s ilicon substrate in a low-pressure (6 mT) environment. Mass spectrosco py measurements of the plasma reveal the presence of C-2n molecules in the expanding plume. Microstructural examination of films deposited u sing this method revealed clustered regions of larger fullerenes and n anotubes surrounded by an amorphous matrix. Films containing fullerene s and nanotubes were found to be significantly harder and more elastic than amorphous carbon films deposited under identical parameters but without conditions for fullerene and/or nanotube formation.