THE MOVE TO 300-MM WAFERS - A PRIME-TIME TO CONSIDER RECLAIM

Authors
JENSCH J THOMSON C
Citation
J. Jensch et C. Thomson, THE MOVE TO 300-MM WAFERS - A PRIME-TIME TO CONSIDER RECLAIM, Solid state technology, 41(2), 1998, pp. 37
Citations number
NO
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
41
Issue
2
Year of publication
1998
Database
ISI
SICI code
0038-111X(1998)41:2<37:TMT3W->2.0.ZU;2-0