HIGH SPATIALLY-RESOLVED MMIC-INTERNAL MILLIMETER-WAVE MEASUREMENTS OFSINUSOIDAL SIGNALS BY HIGH-FREQUENCY ELECTRIC FORCE MICROSCOPE-TESTING

A recently developed high frequency electric force microscope (HF-EFM) test system combines both high spatial and temporal resolution, and e nables functional probing and failure analysis of monolithic microwave -and millimetre-wave integrated circuits (MMICs) on wafer. It has prev iously been shown that this lest system is capable of detecting pulse shaped signals up to 100 GHz on a 1 mu m transistor gate, by using non linear transmission lines as signal generator. For realising the possi bility of testing MMIC-internal devices in normal working conditions, this test system is improved bq using millimetre-wave generators as si gnal sources in order to allow the system to measure sinusoidal signal s. For the first time, the test system was used for measurements of si nusoidal milliwave-wave signals on different MMICS at frequencies up t o 110GHz, simultaneously achieving a spatial resolution better than 2 mu m.