BASIC ALGORITHM FOR FAST MODELING OF MICROSCOPIC IMAGES WITH PARTIALLY COHERENT ILLUMINATION

This paper proposes a technique for computing the intensity distributi on of an ''air'' image for partially coherent illumination of the obje ct. The use of fast algorithms makes it possible to investigate the fo rmation of the images of amplitude-phase objects with high computation al efficiency, allowing for the aberrations of the projection objectiv e. The proposed solution of the problem of sampling points on the sour ce makes it possible to model sources of any size and shape. (C) 1998 The Optical Society of America.